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Characterization of Segmented Polyurethane Surface Domains as related to Chemical Mechanical Polishing (CMP)

著者名:
掲載資料名:
Chemical Mechanical Planarization : proceedings of the International Symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2002-1
発行年:
2002
開始ページ:
32
終了ページ:
45
総ページ数:
14
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773294 [1566773296]
言語:
英語
請求記号:
E23400/2002-1
資料種別:
国際会議録

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