Metal contamination issues resulting from new Si processes

Metal contamination issues resulting from new Si processes

著者名:

Benton, J. L.

掲載資料名:

Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

2001-29

発行年:

2001

開始ページ:

181

終了ページ:

191

総ページ数:

11

出版情報:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566773638 [1566773636]

言語:

英語

請求記号:

E23400/200129

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014033
シリーズID:	PA00000028
会議名:	Symposium on Crystalline Defects and Contamination - DECON ; European Solid State Device Research Conference - ESSDERC
回次:	3rd (2001) ; 31st (2001)
会議開催地:	Nuremberg, Germany
会議開催年:	2001.09.11-2001.09.13

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