Electrical characterization of thin SOI wafer

Electrical characterization of thin SOI wafer

著者名:

掲載資料名:

Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

2001-29

発行年:

2001

開始ページ:

143

終了ページ:

152

総ページ数:

10

出版情報:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566773638 [1566773636]

言語:

英語

請求記号:

E23400/200129

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014033
シリーズID:	PA00000028
会議名:	Symposium on Crystalline Defects and Contamination - DECON ; European Solid State Device Research Conference - ESSDERC
回次:	3rd (2001) ; 31st (2001)
会議開催地:	Nuremberg, Germany
会議開催年:	2001.09.11-2001.09.13

類似資料:

1 国際会議録 CHARACTERIZATION OF SOI WAFERS BY CROSS-SECTIONAL SCANNING PROBE MICROSCOPY Uchihashi, T., Ishizuka, Y., Yoshida, H., Kishino, S. Electrochemical Society	7 国際会議録 Device Applications Using Bonded SOI Wafers Fujino, S., Himi, H., Fukada, T., Yamaguchi, H.(Invited) Electrochemical Society
2 国際会議録 CHARACTERIZATION OF SOI WAFERS BY CROSS-SECTIONAL SCANNING PROBE MICROSCOPY Uchihashi, T., Ishizuka, Y., Yoshida, H., Kishino, S. Electrochemical Society	8 国際会議録 Characterization of PN Junction Leakage Current in Bonded SOI Wafers Hasegawa, H., Murakami, Y., Furuya, H., Shigyouji, T. Electrochemical Society
3 国際会議録 SOI Wafer characterization and gettering aspects of SOI (invited paper) Kishino, S., Yoshida, H. Electrochemical Society	9 国際会議録 Device Applications Using Bonded Thick SOI Wafers Fujino, S., Takahashi, S., Fukada, T., Himi, H., Kawamoto, K. Electrochemical Society
4 国際会議録 Electrical Characterization Of Simox Soi Wafers With Mosos C-V Measurements Li, C.L., Yu, Y.H., Chen, M., Zou, S.C., X, Sh., Lin, Z.X. Materials Research Society	10 国際会議録 INVITED: CHARACTERIZATION OF SOI WAFERS BY PHOTOLUMINESCENCE Tajima, M., Ibuka, S. Electrochemical Society
5 国際会議録 Mobility Characterization by Magnetoresistance in Ultra Thin SOI Ring-FETs T. V. Chandrasekhar Rao, S. Cristoloveanu, J. Antoszewski, T. Nguyen, H. Hovel, P. Genlil, L. Faraone Electrochemical Society	11 国際会議録 INVITED: CHARACTERIZATION OF SOI WAFERS BY PHOTOLUMINESCENCE Tajima, M., Ibuka, S. Electrochemical Society
6 国際会議録 ELECTRICAL CHARACTERIZATION OF Si-SiO2 INTERFACES IN THIN-FILM SOI STRUCTURES marshall, T., Arnold, E., Khan, B. Materials Research Society	12 国際会議録 Characterization of Thin SOI Layers Bengtsson, S. Electrochemical Society

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