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Control of grown-in defects in nitrogen-doped CZ silicon crystal for new generation devices

著者名:
Hourai, M.
Ono, T.
Umeno, S.
Tanaka, T.
Asayaoia, E.
Nishikawa, H.
Sano, M.
Tsuya, H.
さらに 3 件
掲載資料名:
Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2001-29
発行年:
2001
開始ページ:
19
終了ページ:
34
総ページ数:
16
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773638 [1566773636]
言語:
英語
請求記号:
E23400/200129
資料種別:
国際会議録

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