Blank Cover Image

ADVANCED SINGLE CHEMISTRY ALKALINE CLEANING IN A SINGLE TANK TOOL

著者名:
Onsia, B.
Schellkes, E.
Vos, R.
De Gendt, S.
Doll, O.
Fester, A.
Kolbesen, B.
Hoffman, M.
Hatcher, Z.
Wolke, K.
Mertens, P.
Heyns, M.
さらに 7 件
掲載資料名:
Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2001-26
発行年:
2001
開始ページ:
23
終了ページ:
30
総ページ数:
8
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773591 [1566773598]
言語:
英語
請求記号:
E23400/200126
資料種別:
国際会議録

類似資料:

1 国際会議録 Effect of Metal Contamination and Improved Cleaning Strategies

Mertens, P.W., Bearda, T., Lowewenstein, L.M., Martin, A.R., Hub, W., Kolbesen, B.O., Teerlink, I., Vos, R., Baeyens, …

Electrochemical Society
7 国際会議録 INVITED: WAFER CLEANING: A QUANTIFIABLE PROCESS STEP

Mertens, P.W., Loewenstein, L., Vos, R., De Gendt, S., Bearda, T., Heynes, M.M.

Electrochemical Society
2 国際会議録 ADVANCED CLEANING STRATEGIES FOR ULTRA-CLEAN SILICON SURFACES

Heyns, Marc, Bearda, Twan, Cornelissen, Ingrid, De Gendt, Stefan, Loewenstein, Lee, Mertens, Paul, Mertens, Sofie, …

Electrochemical Society
8 国際会議録 EVALUATION OF MEGASONIC CLEANING SYSTEMS FOR PARTICLE REMOVAL EFFICIENCY AND DAMAGING

Vereecke, G., Holsteyns, F., Veltens, J., Lux, M., Amauts, S., Kenis, K., Vos, R., Mertens, P., Heyns, M.

Electrochemical Society
3 国際会議録 QUANTITATIVE MODELING OF H2O2 DECOMPOSITION IN SC1

Mertens, P., Baeyens, M., Moyaerts, G., Okorn-Schmidt, H., Vos, R., De Waele, R., Hatcher, Z., Hub, W., De Gendt, S., …

Electrochemical Society
9 国際会議録 MECHANISMS OF PARTICLE REMOVAL DURING BRUSH SCRUBBER CLEANING

Xu, K., Vos, R., Vereecke, G., Mertens, P., Heyns, M., Vinckier, C., Fransaer, J.

Electrochemical Society
4 国際会議録 APPLICATION OF MOIST OZONE GAS PHASE FOR REMOVAL OF RESIST AND ORGANIC CONTAMINATION IN A NOVEL TANK TYPE PROCESSOR

Wolke, K., Riedel, T., Haug, R., De Gendt, S., Heyns, M.M., Meuris, M.

Electrochemical Society
10 国際会議録 INTEGRATION OF HIGH-k GATE DIELECTRICS - WET ETCH CLEANING AND SURFACE CONDITIONING

De Gendt, S., Beckx, S., Caymax, M., Claes, M., Conard, T., Delabie, A., Deweerd, W., Hellin, D., Kraus, H., Onsia, B., …

Electrochemical Society
5 国際会議録 METAL DEPOSITION ON Ge SURFACES

S. Sioncke, B. Onsia, K. Struys, J. Rip, R. Vos, M. Meuris, P. Mertens, A. Theuwis

Electrochemical Society
11 国際会議録 CLEANING CHEMISTRY WITH COMPLEXING AGENTS (CAs): CA DEGRADATION MONITORING BY UV/VIS SPECTROSCOPY

Doll, O., Kolbesen, B.

Electrochemical Society
6 国際会議録 CORROSION OF ALUMINUM ALLOYS DURING DRYING OF METALLIZED WAFERS

Vos, R., Meuris, M., Mertens, P., Heyns, M., Hatcher, Z.

Electrochemical Society
12 国際会議録 Complexing Agents (CAs) for Semiconductor Cleaning Chemistries: Characterization of CA Lifetimes by UV/VIS-Spectroscopy

Doll, O., Kolbesen, B.O.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12