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Microwave Plasma Deposition of CVD Diamond Films for MEMS Applications

著者名:
掲載資料名:
Diamond materials VII : proceedings of the international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2001-25
発行年:
2001
開始ページ:
252
終了ページ:
263
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773584 [156677358X]
言語:
英語
請求記号:
E23400/200125
資料種別:
国際会議録

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