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Silicon Nitride Etching with Severe Topography In Sub-0.25 Micron Technology

著者名:
Yu, Jie
Liu, WenJun
Yap, ChiewWah
Ng, LiangMoh
Pradeep, Yelehanka R.
Lee, PinHian
Jain, Alok
さらに 2 件
掲載資料名:
Semiconductor technology (ISTC 2001) : proceedings of the 1st International Conference on Semiconductor Technology
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2001-17
発行年:
2001
開始ページ:
459
終了ページ:
463
総ページ数:
5
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773508 [1566773504]
言語:
英語
請求記号:
E23400/200117
資料種別:
国際会議録

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