Blank Cover Image

Effects Of A Thin Flash Copper Layer On The Diffusion Of Cu, Ta, Si, And O In The Cu/TaN/SiO2/Si Structures

著者名:
Loh, S.W.
Zhang, D.H.
Li, C.Y.
Liu, R.
Wee, A.T.S.
Foo, P.D.
Xie, Joseph
Prasad, K.
Tan, C.M.
Lee, Y.K.
さらに 5 件
掲載資料名:
Semiconductor technology (ISTC 2001) : proceedings of the 1st International Conference on Semiconductor Technology
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2001-17
発行年:
2001
開始ページ:
116
終了ページ:
122
総ページ数:
7
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773508 [1566773504]
言語:
英語
請求記号:
E23400/200117
資料種別:
国際会議録

類似資料:

Loh,S.W., Zhang,D.H., Li,C.Y., Liu,R., Wee,A.T.S.

SPIE-The International Society for Optical Engineering

Narayanan,B., Li,C.Y., Lee,K., Yu,B., Wu,J.J., Foo,P.D., Xie,J.

SPIE - The International Society for Optical Engineering

Prasad, K., Yuan, X.L., Tan, C.M., Zhang, D.H., Li, C. Y., Wang, S.R., Yuan, S.Y.J., Xie, J.L., Gui, D., Foo, P.D.

Materials Research Society

Lai, L.W., Chang, C.C., Chen, J.S., Lin, Y.K.

Electrochemical Society

Yang, L.Y., Zhang, D.H, Li, C.Y., Foc, P.D., Prasad, K., Tan, C.M.

Electrochemical Society

C.Y. Liu, Y.C. Li, C.H. Lai, S.K. Liu

Trans Tech Publications

Li,C.Y., Zhang,D.H., Qian,Y., Narayanan,B., Wu,J.J., Yu,B., Jiang,Z.X., Foo,P.D., Xie,J., Zhang,Q., Yoon,S.F.

SPIE - The International Society for Optical Engineering

C.Y. Shi, Y.K. Guo, S.J. Zhao, C.M. Song

Trans Tech Publications

Zhao, S.P., Koh, L.T., Zhang, D.H., Loh, S.A., Liew, G.M., Li, C.Y., Woo, Y.K., Cheng, C.K., Foo, P.D.

Electrochemical Society

C.T. Lin, Y.K. Su, S.J. Chang, D.K. Nayak, Y. Shiraki

Society of Photo-optical Instrumentation Engineers

Pan, J.S., Wee, A.T.S., Huan, C.H.A., Chai, J.W., Zhang, J.H.

Materials Research Society

Chen, Wei, Loh, Kian Ping, Xu, Hai, Wee, A.T.S.

Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12