Contact Processes For Advanced DRAM And CMOS Logic Devices* | 東京工業大学附属図書館文献データベース

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Contact Processes For Advanced DRAM And CMOS Logic Devices*

著者名:

Chapple-Sokol, J.

さらに 11 件

掲載資料名:

Semiconductor technology (ISTC 2001) : proceedings of the 1st International Conference on Semiconductor Technology

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

2001-17

発行年:

2001

開始ページ:

473

終了ページ:

484

総ページ数:

12

出版情報:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566773508 [1566773504]

言語:

英語

請求記号:

E23400/200117

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014020
シリーズID:	PA00000028
会議名:	International Conference on Semiconductor Technology - ISTC
回次:	1st (2001)
会議開催地:	Shanghai, China
会議開催年:	2001.05.27-2001.05.30

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