CFD Modeling of Aerosol Reactors for Material Synthesis

CFD Modeling of Aerosol Reactors for Material Synthesis

著者名:

掲載資料名:

Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

2001-13

発行年:

2001

開始ページ:

488

終了ページ:

495

総ページ数:

8

出版情報:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566773195 [1566773199]

言語:

英語

請求記号:

E23400/200113

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014016
シリーズID:	PA00000028
会議名:	Fundamental Gas-Phase and Surface Chemistry of Vaper-Phase Materials Synthesis ; Symposium on Process Control, Diagnostics and Modeling in Semiconductor Manufacturing
回次:	2nd ; 4th
会議開催地:	Washington, D.C., USA
会議開催年:	2001.00.00

類似資料:

1 国際会議録 Modeling of Growth Processes in Epitaxial Reactors Carra,S., Cavallotti,C., Masi,M. Trans Tech Publications	7 国際会議録 Aerosol Dynamics Modeling and Computational Fluid Dynamics of a Laser-Driven Nanoparticle Synthesis Reactor Talukdar, S., Ng, C., Swihart, M. Electrochemical Society
2 国際会議録 Detailed Modeling of Barrel Chemical Vapor Deposition Reactors Masi,M., Fogliani,S., Carra,S. Trans Tech Publications	8 国際会議録 Detailed Kinetics Modeling of Indium Phosphide Films in MOCVD Reactors Masi, Maurizio, Cavallotti, Carlo, Radaelli, Guido, Carra, S. MRS - Materials Research Society
3 国際会議録 Modeling and Optimization of Barrel Reactors for Epitaxial Silicon CVD Masi, M., Fogliani, S., Carra, S. Electrochemical Society	9 国際会議録 Modeling Approach Towards the Dislocation Density Reduction in InP LEC Grown Crystals Fogliani, S., Masi, M., Carra, S. American Institute of Chemical Engineers
4 国際会議録 Computational Fluid Dynamics (CFD) Modeling of a Laser-Driven Aerosol Reactor M.T. Swihart, Y. He, S.S. Talukdar Electrochemical Society	10 国際会議録 Liquid Encapsulated Czochralski Growth Conditions Design Through Simplified Transient Models Masi, M., Fogliani, S., Carra, S. American Institute of Chemical Engineers
5 国際会議録 Simulation of Diamond-Like Carbon Deposition in PECVD Reactors Masi, M., Cavallotti, C., Carra, S. Electrochemical Society	11 国際会議録 Detailed Modeling of Multicomponent Emulsion Polymerization Systems Storti, G., Morbidelli, M., Carra, S. American Chemical Society
6 国際会議録 Gas Phase and Surface Kinetics of Diamond-Like Carbon Films Growth in PECVD Reactors Masi, M., Cavallotti, C., Carra, S. MRS - Materials Research Society	12 国際会議録 SYNTHESIS OF TITANIA POWDER BY TITANIUM TETRACHLORIDE OXIDATION IN AN AEROSOL FLOW REACTOR Akhtar, M.K., Xiong, Y., Pratsinis, S.E. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12