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Two-Dimensional Simulation of Pulsed Power Electronegative Plasmas

著者名:
掲載資料名:
Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2001-13
発行年:
2001
開始ページ:
308
終了ページ:
315
総ページ数:
8
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773195 [1566773199]
言語:
英語
請求記号:
E23400/200113
資料種別:
国際会議録

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