Two-Dimensional Simulation of Pulsed Power Electronegative Plasmas
- 著者名:
- 掲載資料名:
- Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 2001-13
- 発行年:
- 2001
- 開始ページ:
- 308
- 終了ページ:
- 315
- 総ページ数:
- 8
- 出版情報:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566773195 [1566773199]
- 言語:
- 英語
- 請求記号:
- E23400/200113
- 資料種別:
- 国際会議録
類似資料:
1
国際会議録
Modeling and Simulation of Two-Dimensional Reactive Plasma Flow in Inductively Coupled Reactors
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