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The Vertical Replacement-Gate (VRG) MOSFET: A High-Performance, Vertical MOSFET with Lithography-Independent Critical Dimensions

著者名:
Hergenrother, J.M.
Oh, S.H.
Nigam, T.
Monroe, D.
Klemens, F.P.
Kornblit, A.
Baumann, F.H.
Grazul, J.L.
Johnson, R.W.
King, C.A.
Kleiman, R.N.
さらに 6 件
掲載資料名:
Rapid thermal and other short-time processing technologies II : proceedings of the international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2001-9
発行年:
2001
開始ページ:
381
終了ページ:
392
総ページ数:
12
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773157 [1566773156]
言語:
英語
請求記号:
E23400/2001-9
資料種別:
国際会議録

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