The Vertical Replacement-Gate (VRG) MOSFET: A High-Performance, Vertical MOSFET with Lithography-Independent Critical Dimensions
- 著者名:
Hergenrother, J.M. Oh, S.H. Nigam, T. Monroe, D. Klemens, F.P. Kornblit, A. Baumann, F.H. Grazul, J.L. Johnson, R.W. King, C.A. Kleiman, R.N. - 掲載資料名:
- Rapid thermal and other short-time processing technologies II : proceedings of the international symposium
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 2001-9
- 発行年:
- 2001
- 開始ページ:
- 381
- 終了ページ:
- 392
- 総ページ数:
- 12
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566773157 [1566773156]
- 言語:
- 英語
- 請求記号:
- E23400/2001-9
- 資料種別:
- 国際会議録
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