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High Integrity Direct Oxidation/Nitridation at Low Temperatures Using Radicals

著者名:
掲載資料名:
Silicon Nitride and Silicon Dioxide Thin Insulating Films : proceedings of the sixth International Symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2001-7
発行年:
2001
開始ページ:
241
終了ページ:
252
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773133 [156677313X]
言語:
英語
請求記号:
E23400/2001-7
資料種別:
国際会議録

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