Defects and Strain in Hydrogen and Helium Co-Implanted Silicon
- 著者名:
Duo, X. Liu, W. Zhang, M. Wang, S.X. Wang, L.M. Lin, C. - 掲載資料名:
- Silicon-on-Insulator Technology and Devices X : proceedings of the tenth International Symposium
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 2001-3
- 発行年:
- 2001
- 開始ページ:
- 69
- 終了ページ:
- 74
- 総ページ数:
- 6
- 出版情報:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566773096 [1566773091]
- 言語:
- 英語
- 請求記号:
- E23400/2001-3
- 資料種別:
- 国際会議録
類似資料:
Trans Tech Publications |
Trans Tech Publications |
SPIE-The International Society for Optical Engineering |
Materials Research Society |
Trans Tech Publications |
Trans Tech Publications |
Trans Tech Publications |
Electrochemical Society |
5
国際会議録
DEEP LEVEL SPECTRA OF ION-IMPLANTATION DEFECTS AND SLIP DISLOCATIONS INTRODUCED BY CO2 LASER
Materials Research Society |
Materials Research Society |
MRS - Materials Research Society |
MRS - Materials Research Society |