Ion Beam Synthesis of SiC on Insulator Structures | 東京工業大学附属図書館文献データベース

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Ion Beam Synthesis of SiC on Insulator Structures

著者名:

Perez-Rodriguez, A.

Romano-Rodriguez, A.

さらに 4 件

掲載資料名:

Silicon-on-Insulator Technology and Devices X : proceedings of the tenth International Symposium

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

2001-3

発行年:

2001

開始ページ:

13

終了ページ:

18

総ページ数:

6

出版情報:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566773096 [1566773091]

言語:

英語

請求記号:

E23400/2001-3

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014007
シリーズID:	PA00000028
会議名:	International Symposium on Silicon-on-Insulator Technology and Devices ; Meeting of the Electrochemical Society
回次:	10th : 199th
会議開催地:	Washington D.C., USA
会議開催年:	2001.03.25-2001.03.29

類似資料:

1 国際会議録 Structural and Electrical Characterization of Ion Beam Synthesized and n-Doped SiC Layers Serre, C., Panknin, D., Perez-Rodriguez, A., Romano-Rodriguez, A., Morante, J.R., Koegler, R., Skorupa, W., Esteve, J., … Trans Tech Publications	7 国際会議録 Optical characterization of carbon ion implantation into Si and SiGe alloys (Invited Paper) Perez-Rodriguez,A., Romano-Rodriguez,A., Serre,C., Calvo-Barrio,L., Gonzalez-Varona,O., Morante,J.R. SPIE-The International Society for Optical Engineering
2 国際会議録 SiCOI structures. Technology and characterization Serre, C., Perez-Rodriguez, A., Romano-Rodriguez, A., Morante, J.R., Esteve, J., Acero, M.C., Koegler, R., Skorupa, W. Kluwer Academic Publishers	8 国際会議録 MICROSTRUCTURE OF BURIED THIN ETCH STOP FILMS FORMED BY NITROGEN IMPLANTATION INTO SILICON Romano-Rodriguez, A., El-Hassani, A., Perez-Rodriguez, A., Samitier, J., Morante, J. R., Esteve, J., Acero, M. C. MRS - Materials Research Society
3 国際会議録 Epitaxial Growth of β-SiC on Ion-Beam Synthesized β-SiC: Structural Characterization Romano-Rodriguez, A., Perez-Rodriguez, A., Serre, C., Morante, J. R., Esteve, J., Acero, M. C., Kogler, R., Skorupa, W., … Trans Tech Publications	9 国際会議録 Fabrication of Electrical Nanocontacts to Nanometer-Sized Materials and Structures using a Focused Ion Beam Hernandez-Ramirez, F., Casals, O., Rodriguez, J., Vila, A., Romano-Rodriguez, A., Morante, J.R., Abid, M., Valizadeh, S. Materials Research Society
4 国際会議録 Synthesis of Thin Membranes in Si Technology by Carbon Ion Implantation Serre, C., Perez-Rodriguez, A., Calvo-Barrio, L., Romano-Rodriguez, A., Morante, J. R., Esteve, J., Acero, M. C., … MRS - Materials Research Society	10 国際会議録 FORMATION OF A BURIED STACKED INSULATOR BY ION BEAM SYNTHESIS Skorupa, W., Grotzschel, R., Wollschlager, K., Albrecht, J., Vohse, H. Materials Research Society
5 国際会議録 lon-beam-induced amorphization and recrystallization processes in SiC:Raman-scattering analysis Perez-Rodriquez,A., Serre,C., Calvo-Barrio,L., Romano-Rodriquez,A., Morante,J.R., Pacaud,Y., Kogler,R., Skorupa,W. SPIE-The International Society for Optical Engineering	11 国際会議録 RAMAN SPECTROSCOPY ANALYSIS OF NITROGEN ION IMPLANTATION IN SILICON AND CORRELATION WITH TRANSMISSION ELECTRON MICROSCOPY Perez-Rodriguez, A., Romano-Rodriguez, A., Morante, J.R., Esteve, J., Montserrat, J. Materials Research Society
6 国際会議録 Raman scattering analysis of defects in 6H-SiC induced by ion implantation Perez-Rodriguez,A., Gonzalez-Varona,O., Calvo-Barrio,L., Morante,J.R., Wirth,H., Panknin,D., Skorupa,W. Trans Tech Publications	12 国際会議録 Doping and structural properties for the phosphorous-doped polysilicon layers used for micromechanical applications Gaiseanu,F., Esteve,J., Cane,C., Perez-Rodriguez,A., Morante,J.R., Serre,C. SPIE - The International Society for Optical Engineering

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