Formation and Properties of Co-Suicide by Using Col-x Tax Alloy
- 著者名:
Kim, M.-J. Lee, D.-H. Ko, D.-H. Ku, J.-H. Choi, S. Fujihara, K. Kang, H.-K. Oh, S-H. Park, C.-G. Lee, H.-J. - 掲載資料名:
- ULSI Process Integration : proceedings of the International Symposium
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 2001-2
- 発行年:
- 2001
- 開始ページ:
- 571
- 終了ページ:
- 580
- 総ページ数:
- 10
- 出版情報:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566773089 [1566773083]
- 言語:
- 英語
- 請求記号:
- E23400/2001-2
- 資料種別:
- 国際会議録
類似資料:
Electrochemical Society |
SPIE - The International Society of Optical Engineering |
Materials Research Society |
SPIE - The International Society of Optical Engineering |
Electrochemical Society |
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
Society of Automotive Engineers |
MRS-Materials Research Society |
Trans Tech Publications |
Society of Automotive Engineers |
Trans Tech Publications |