Impact of Metallic Impurities on Integrity of Ultra-Thin Gate Oxides and Gettering in Advanced Silicon Wafers*

Impact of Metallic Impurities on Integrity of Ultra-Thin Gate Oxides and Gettering in Advanced Silicon Wafers*

著者名:

掲載資料名:

ULSI Process Integration : proceedings of the International Symposium

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

2001-2

発行年:

2001

開始ページ:

333

終了ページ:

349

総ページ数:

17

出版情報:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566773089 [1566773083]

言語:

英語

請求記号:

E23400/2001-2

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014006
シリーズID:	PA00000028
会議名:	International Symposium on ULSI Process Integration ; Meeting of the Electrochemical Society
回次:	2nd ; 199th
会議開催地:	Washington, D.C., USA
会議開催年:	2001.03.24-2001.03.31

類似資料:

1 国際会議録 Degradation of Gate Oxide Integrity due to Ni and Cu Contamination and Impurity Gettering in Epitaxial Si Wafers Koveshnikov, S., Beauchaine, D., Radzimski, Z., Higgs, V. Electrochemical Society	7 国際会議録 He-induced Nanocavities for the Gettering of Metallic Impurities in Silicon Ntsoenzok, E., Delamare, R., Alquier, D., Liu, C.L., Ashok, S., Ruault, M.O. Electrochemical Society
2 国際会議録 Gettering of Fe, Cu and Ni in MeV Ion Implanted Epitaxial Silicon Koveshnikov, S., Kononchuk, O., Beaman, K., Rozgonyi, G.A., Gonzalez, F. Electrochemical Society	8 国際会議録 EFFECTS OF PRE-GATE OXIDATION CLEANING AND GETTERING UPON THE VERY THIN OXIDE INTEGRITY Lee, J., Tung, C.Y., Hahn, S., Chiao, P. Materials Research Society
3 国際会議録 Metallic impurities and their impact on the formation of internal gettering layer in silicon wafers Jablonski, J. Electrochemical Society	9 国際会議録 The Impact of the Dwell Time Above 900℃ During Crystal Growth on the Gate Oxide Integrity of Silicon Wafers Dornberger, E., von Ammon, W., Graef, D., Lambert, U., Miller, A., Oelkrug, H., Ehlert, A. Electrochemical Society
4 国際会議録 Organic Contamination of Silicon Wafer in Clean Room Air and Its Impact to Gate Oxide Integrity Imafuku, D., Mizubayashi, W., Miyazaki, S., Hirose, M., Wakayama, Y., Kobayashi, S. MRS - Materials Research Society	10 国際会議録 GETTERING OF METALLIC IMPURITIES IN SILICON Ourmazd, A., Schroter, W. Materials Research Society
5 国際会議録 Organic Contamination of Silicon Wafer in Clean Room Air and Its Impact to Gate Oxide Integrity Imafuku, D., Mizubayashi, W., Miyazaki, S., Hirose, M., Wakayama, Y., Kobayashi, S. MRS - Materials Research Society	11 国際会議録 EFFECTS OF PRE-GATE OXIDATION INTRINSIC GETTERING UPON THIN GATE OXIDE INTEGRITY IN HIGH CARBON CONTENT Cz Si Hahn, S., Tung, C. Y., Lee, J., Tuomi, T., Partanen, J. Materials Research Society
6 国際会議録 CRITICAL ASPECTS OF WAFER CLEANING AND GATE OXIDE INTEGRITY Mertens, P.W., Meuris, M., Schmidt, H.F., Verhaverbeke, S., Heyns, M.M., Carr, P., Graeff, D., Schnegg, A., Kubota, M., … Electrochemical Society	12 国際会議録 EFFECTS OF PRE-GATE OXIDATION INTRINSIC GETTERING UPON THIN GATE OXIDE INTEGRITY IN HIGH CARBON CONTENT Cz Si Hahn, S., Tung, C. Y., Lee, J., Tuomi, T., Partnanen, J. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12