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Nanometer Trackwidth Definition by E-Beam Lithography for Advanced Magnetic Recording Heads

著者名:
掲載資料名:
Magnetic Materials, Processes, and Devices VI, Applications to Storage and Microelectromechanical Systems (MEMS) : proceedings of the International Symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2000-29
発行年:
2000
開始ページ:
332
終了ページ:
342
総ページ数:
11
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772969 [1566772966]
言語:
英語
請求記号:
E23400/200029
資料種別:
国際会議録

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