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Resonance Ultrasonic Diagnostics of As-Grown and Process-Induced Defects in Cz Silicon

著者名:
Belyaev, A.
Tarasov, I.
Ostapenko, S.
Koveshnikov, S.
Kochelap, V.A.
Beyaev, A.E.
さらに 1 件
掲載資料名:
High Purity Silicon VI : proceedings of the sixth International Symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2000-17
発行年:
2000
開始ページ:
660
終了ページ:
669
総ページ数:
10
出版情報:
Bellingham, Wash.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772846 [1566772842]
言語:
英語
請求記号:
E23400/200017
資料種別:
国際会議録

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