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Silicon Defect characterization by High Resolution Laplace Deep Level Transient Spectroscopy*

著者名:
Peaker, A.R.
Dobaczewski, L.
Andersen, O.
Rubaldo, L.
Hawkins, I.D.
Bonde Nielsen, K.
Evans-Freeman, J.H.
さらに 2 件
掲載資料名:
High Purity Silicon VI : proceedings of the sixth International Symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2000-17
発行年:
2000
開始ページ:
549
終了ページ:
560
総ページ数:
12
出版情報:
Bellingham, Wash.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772846 [1566772842]
言語:
英語
請求記号:
E23400/200017
資料種別:
国際会議録

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