Copper Stable Isotope Spike Method as A Tool for Low Temperature Out-Diffusion of Copper in P-Type Silicon
- 著者名:
- 掲載資料名:
- High Purity Silicon VI : proceedings of the sixth International Symposium
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 2000-17
- 発行年:
- 2000
- 開始ページ:
- 287
- 終了ページ:
- 295
- 総ページ数:
- 9
- 出版情報:
- Bellingham, Wash.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772846 [1566772842]
- 言語:
- 英語
- 請求記号:
- E23400/200017
- 資料種別:
- 国際会議録
類似資料:
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7
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