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Bulk and Surface Properties of Cz Silicon After Hydrogen Plasma

著者名:
Job, R.
Ulyashin, AG.
Fahrner, W.R.
Markevich, V.P.
Murin, LI.
LindstrtSm, J.L.
Raiko, V.
Engemann, J.
さらに 3 件
掲載資料名:
High Purity Silicon VI : proceedings of the sixth International Symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2000-17
発行年:
2000
開始ページ:
209
終了ページ:
222
総ページ数:
14
出版情報:
Bellingham, Wash.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772846 [1566772842]
言語:
英語
請求記号:
E23400/200017
資料種別:
国際会議録

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1 国際会議録 Bulk and Surface Properties of Cz Silicon After Hydrogen Plasma Treatments

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