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Athermal Annealing of Silicon Implanted with Phosphorus and Arsenic

著者名:
Grun, J.
Fischer, R.P.
Peckerar, M.
Felix, C.L.
Covington, B.C.
Donnelly, D.W.
Boro Djordjevic, B.
Mignogna, R.
Meyer, J.R.
Ting, A.
Manka, C.K
さらに 6 件
掲載資料名:
Rapid thermal and other short-time processing technologies : proceedings of the international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2000-9
発行年:
2000
開始ページ:
107
終了ページ:
118
総ページ数:
12
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772747 [1566772745]
言語:
英語
請求記号:
E23400/2000-9
資料種別:
国際会議録

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