High Ramp Rate Rapid Thermal Annealing for Ultra-Shallow Junctions
- 著者名:
Kohli, P. Li, H.-J. Ganguly, S. Kirichenko, T. Murto, B. Graetz, E. Zeitzoff, P. Pawlik, M. Merrill, P.B. Banerjee, S. - 掲載資料名:
- Rapid thermal and other short-time processing technologies : proceedings of the international symposium
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 2000-9
- 発行年:
- 2000
- 開始ページ:
- 3
- 終了ページ:
- 14
- 総ページ数:
- 12
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772747 [1566772745]
- 言語:
- 英語
- 請求記号:
- E23400/2000-9
- 資料種別:
- 国際会議録
類似資料:
Electrochemical Society |
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MRS - Materials Research Society |
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SPIE-The International Society for Optical Engineering, Narosa |
11
国際会議録
Ultra Shallow p +/n Junctions Fabricated by Plasma Doping and All Solid State Laser Annealing
Electrochemical Society |
Electrochemical Society |
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