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High Ramp Rate Rapid Thermal Annealing for Ultra-Shallow Junctions

著者名:
Kohli, P.
Li, H.-J.
Ganguly, S.
Kirichenko, T.
Murto, B.
Graetz, E.
Zeitzoff, P.
Pawlik, M.
Merrill, P.B.
Banerjee, S.
さらに 5 件
掲載資料名:
Rapid thermal and other short-time processing technologies : proceedings of the international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2000-9
発行年:
2000
開始ページ:
3
終了ページ:
14
総ページ数:
12
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772747 [1566772745]
言語:
英語
請求記号:
E23400/2000-9
資料種別:
国際会議録

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