Evaluation of the Applied Materials Remote Clean TM Technology for Lamp Heated CVD Chambers for Perfluorocompound (PFC) Emissions Reduction
- 著者名:
Mendicino, L. ( Motorola ) Nauert, C. ( Motorola ) Flood, J. ( Motorola ) Brown, P.T. ( Motorola ) Atherton, A. ( Applied Materials ) Nowak, T. ( Applied Materials ) Silvetti, D. ( Applied Materials ) - 掲載資料名:
- Environmental issues in the electronics and semiconductor industries : proceedings of the third international symposium
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 2000-7
- 発行年:
- 2000
- 開始ページ:
- 42
- 終了ページ:
- 51
- 総ページ数:
- 10
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772723 [1566772729]
- 言語:
- 英語
- 請求記号:
- E23400/2000-7
- 資料種別:
- 国際会議録
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