Blank Cover Image

Etching Temperature and Via Resistance

著者名:
掲載資料名:
Plasma processing XIII : proceedings of the international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2000-6
発行年:
2000
開始ページ:
368
終了ページ:
373
総ページ数:
6
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772716 [1566772710]
言語:
英語
請求記号:
E23400/2000-6
資料種別:
国際会議録

類似資料:

1 国際会議録 A Study on the Effect of Post Metal Etching Polymer Strip Process on Via Resistance

Koh, L-T., Chooi, S. Y. M., Chok, K-L., Li, H-M., Gn, F-H.

MRS - Materials Research Society
7 国際会議録 Challenges of damascene etching for copper interconnect

Ho,P.K.K., Zhou,M.-S., Gupta,S., Chockalingam,R., Li,J.-X., Fan,M.-H.

SPIE - The International Society for Optical Engineering
2 国際会議録 Derivation of the nonlinear heating conduction equation and calculation of the temperature field heated by laser

Zhou,Y., Li,J., Zhou,L.

SPIE - The International Society for Optical Engineering
8 国際会議録 Optimizing feed-forward neural networks using cascaded genetic algorithm

Zhou, L., Li, M., Yang, X.

SPIE - The International Society of Optical Engineering
3 国際会議録 Metastable Superstructures in RuSr2Gd1.4Ce0.6Cu2O10-a Superconductor Based on TEM Observation at Room Temperature

Yang, Li, Vieira, J.M., Tang, Kaibin, Zhou, Guien

Materials Research Society
9 国際会議録 Temperature Independent Resistance Response for Mixed Conducting SrFeyCo zOx Thin Films

Tunney, J., Post, M., Du, X., Yang, D.

Electrochemical Society
4 国際会議録 BCB Deep Via Etching Process on ICP Etching System

Wang, J.J., Zeng, X., Li, D., Monier, C., Chang, P.C., Barsky, M., Gutierrez-Aitken, A.

Electrochemical Society
10 国際会議録 High-Temperature Mechanical Properties of As-Extruded ZK60

Wu, W., Hong, C. M., Chen, L. J., Wang, Y., Yang, L., Li, F., Liu, Z.

Trans Tech Publications
5 国際会議録 Creep Resistance of Zr-Sn-Nb-Fe-Cr Alloy

Li, Z., Wang, W., Zhang, J., Zhou, L.

Trans Tech Publications
11 国際会議録 Improvement of Mechanical Properties and In Vitro Degradation Resistance of Biodegradable Mg-1.5Zn-0.6Zr-0.2Sc Alloy by Extrusion

T. Li, H.L. Zhang, S.Q. Tang, Y.S. Yang, J.X. Zhou, X.T. Wang

Trans Tech Publications
6 国際会議録 High-Temperature Oxidation Resistance of Electroless Ni-P-ZrO2 Composite Coatings

M.F. Tan, W.C. Sun, L. Zhang, Q. Zhou, J. Ding

Trans Tech Publications
12 国際会議録 Preparation of Large-Area Porous Silicon through Cu-Assisted Chemical Etching

M. Cao, S.Y. Li, J.X. Deng, X.W. Yang, Y.P. Li

Trans Tech Publications
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12