Low Temperature, Permanent Magnet Electron Cyclotron Resonance Plasma Deposition of Thermally Stable Amorphous Silicon and Silicon Nitride
- 著者名:
- 掲載資料名:
- Plasma processing XIII : proceedings of the international symposium
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 2000-6
- 発行年:
- 2000
- 開始ページ:
- 1
- 終了ページ:
- 12
- 総ページ数:
- 12
- 出版情報:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772716 [1566772710]
- 言語:
- 英語
- 請求記号:
- E23400/2000-6
- 資料種別:
- 国際会議録
類似資料:
MRS - Materials Research Society |
Materials Research Society |
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
MRS-Materials Research Society |
10
国際会議録
SILICON NITRIDE DEPOSITED AT VERY LOW SILANE PRESSURES USING ELECTRON CYCLOTRON RESONANCE PLASMAS
Materials Research Society |
Materials Research Society |
Materials Research Society |
Materials Research Society |
MRS - Materials Research Society |