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Studies of High-k Gate Dielectrics Deposited hy the Liquid Source Misted Chemical Deposition Method

著者名:
Lee, D. ( (Penn State University) )
Roman, P. ( (Penn State University) )
Mumbauer, P. ( (PRIMAXX, Inc.) )
Grant, R. ( (PRIMAXX, Inc.) )
Horn, M. ( (Penn State University) )
Ruzyllo, J. ( (Penn State University) )
さらに 1 件
掲載資料名:
Low and high dielectric constant materials : materials science, processing, and reliability issues : proceedings of the fifth international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2000-5
発行年:
2000
開始ページ:
237
終了ページ:
242
総ページ数:
6
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772709 [1566772702]
言語:
英語
請求記号:
E23400/2000-5
資料種別:
国際会議録

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