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Processing Effects and Electrical Evaluation of ZrO2 Formed by RTP Oxidation of Zr

著者名:
Nieh, R. ( (University of Texas at Austin) )
Qi, W-J. ( (University of Texas at Austin) )
Lee, B.H. ( (University of Texas at Austin) )
Kang, L. ( (University of Texas at Austin) )
Jeon, Y. ( (University of Texas at Austin) )
Onishi, K. ( (University of Texas at Austin) )
Gopalan, S. ( (University of Texas at Austin) )
Kang, C.S. ( (University of Texas at Austin) )
Dhrarmarajan, E. ( (University of Texas at Austin) )
Choi, R. ( (University of Texas at Austin) )
Lee, J.C. ( (University of Texas at Austin) )
さらに 6 件
掲載資料名:
Low and high dielectric constant materials : materials science, processing, and reliability issues : proceedings of the fifth international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2000-5
発行年:
2000
開始ページ:
214
終了ページ:
221
総ページ数:
8
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772709 [1566772702]
言語:
英語
請求記号:
E23400/2000-5
資料種別:
国際会議録

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