Blank Cover Image

Charge Transport in Anodized Ta205, HfO2 and ZrO2 Thin Films

著者名:
Jones, C.D.W. ( (Bell Labs - Lucent Technologies) )
Fleming, R.M ( (Bell Labs - Lucent Technologies) )
Lang, D.V. ( (Bell Labs - Lucent Technologies) )
Steigerwald, M.L. ( (Bell Labs - Lucent Technologies) )
Murphy, D.W. ( (Bell Labs - Lucent Technologies) )
Vyas, B. ( (Bell Labs - Lucent Technologies) )
Alers, G.B. ( (Bell Labs - Lucent Technologies) )
Wong, Y.-H. ( (Bell Labs - Lucent Technologies) )
van Dover, R.B. ( (Bell Labs - Lucent Technologies) )
Kwo, J.R. ( (Bell Labs - Lucent Technologies) )
Sergent, A.M. ( (Bell Labs - Lucent Technologies) )
さらに 6 件
掲載資料名:
Low and high dielectric constant materials : materials science, processing, and reliability issues : proceedings of the fifth international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2000-5
発行年:
2000
開始ページ:
205
終了ページ:
213
総ページ数:
9
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772709 [1566772702]
言語:
英語
請求記号:
E23400/2000-5
資料種別:
国際会議録

類似資料:

1 国際会議録 Material and Electrical Characterization of Carbon-Doped Ta2O5 Films for Embedded DRAM Applications

Chu, Karen, Cho, Byeong-Ok, Chang, Jane P., Steigerwald, Mike L., Fleming, Robert M., Opila, Robert L., Lang, Dave V., …

Materials Research Society
7 国際会議録 Electronic Structure of ZrO2 and HfO2

Perevalov, T. V., Shaposhnikov, A. V., Nasyrov, K. A., Gritsenko, D. V., Gristsenko, V. A., Tapilin, V. M.

Springer
2 国際会議録 The (Ga2O3)1-x(Gd2O3)x oxides with x=0-1.0 for GaAs passivation

Kwo, J., Hong, M., Kortan, A.R., Murphy, D.W., Mannaerts, J.P., Sergent, A.M., Wang, Y.C., Hsieh, K.C.

Materials Research Society
8 国際会議録 SUPERLATTICE MODULATION IN Nd2CuO4 AND THE ELECTRON-DOPED SYSTEMS Nd2-xCuO4-xFx

James, A.C.W.P., Murphy, D.W., Chen, C.H., Werder, D.J., Chiang, J., Zahurak, S.M., Fleming, R.M., Batlogg, B., …

Materials Research Society
3 国際会議録 MEASUREMENT OF THE BANDGAP OF GexSil-x/Si STRAINED-LAYER HETEROSTRUCTURES

Lang, D.V., People, R., Bean, J.C., Sergent, A.M.

Materials Research Society
9 国際会議録 MATERIAL PROPERTIES OF GaAs-ON-Si AND FABRICATION OF DIGITAL INTEGRATED CIRCUITS

Chand, N., Ren, F., Chu, S.N.G., Sergent, A.M., Boone, T., Lang, D.V.

Materials Research Society
4 国際会議録 Nucleation and Growth of ALD HfO2 and ZrO2 Films, and the Effects of Post-Deposition Annealing on Electrical Properties

Green, M.L, Canard, T., Brijs, B., Ho, M.-Y., Wilk, G.D., Rdisiinen, P.I., Sorsch, T., Vandervorst, W.

Electrochemical Society
10 国際会議録 ELECTICAL CHARACTERIZATION OF DEFECTS IN GaAs GROWN ON Si BY MBE

Chand, N., Fischer, R., Sergent, A. M., Lang, D. V., Cho, A. Y.

Materials Research Society
5 国際会議録 DIFFRACTION SYMMETRY IN CRYSTALLINE, CLOSE-PACKED C60

Fleming, R.M., Siegrist, T., Marsh, P.M., Hessen, B., Kortan, A.R., Murphy, D.W., Haddon, R.C., Tycko, R., Dabbagh, G., …

Materials Research Society
11 国際会議録 High Dielectric Constant Hf-Ti-Sn-O Off-Axis Cosputtered Films

Schneemeyer, L. F., Dover, R. B. van, Fleming, R. M.

MRS - Materials Research Society
6 国際会議録 EPITAXIAL FILMS OF HIGH TC OXIDE SUPERCONDUCTORS Y1Ba2Cu3O7 GROWN ON SrTiO3 BY MOLECULAR BEAM EPITAXY

Kwo, J., Hsieh, T. C., Hong, M., Fleming, R. M., Liou, S. H., Davidson, B. A.

Materials Research Society
12 国際会議録 Improved Properties of TaOx Films Doped With Al and N

Dover, R. B. van, Schneemeyer, L. F., Fleming, R. M., Werder, D. J.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12