Characterization of Gd2O3 Films Deposited on Si(l00) by E-Beam Evaporation from Pressed-Powder Targets
- 著者名:
Landheer, D. ( (National Research Council of Canada) ) Gupta, J. ( (National Research Council of Canada) ) Hulse, J. ( (National Research Council of Canada) ) Sproule, I. ( (National Research Council of Canada) ) McCaffrey, J. ( (National Research Council of Canada) ) Graham, M. ( (National Research Council of Canada) ) Yang, K.-C. ( (University of Toronto) ) Lu, Z. ( (University of Toronto) ) Lennard, W.N. ( (University of Western Ontario) ) - 掲載資料名:
- Low and high dielectric constant materials : materials science, processing, and reliability issues : proceedings of the fifth international symposium
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 2000-5
- 発行年:
- 2000
- 開始ページ:
- 193
- 終了ページ:
- 204
- 総ページ数:
- 12
- 出版情報:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772709 [1566772702]
- 言語:
- 英語
- 請求記号:
- E23400/2000-5
- 資料種別:
- 国際会議録
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