Blank Cover Image

Characterization of Ashing Effects on Low-k Dielectric Films

著者名:
掲載資料名:
Low and high dielectric constant materials : materials science, processing, and reliability issues : proceedings of the fifth international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2000-5
発行年:
2000
開始ページ:
159
終了ページ:
167
総ページ数:
9
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772709 [1566772702]
言語:
英語
請求記号:
E23400/2000-5
資料種別:
国際会議録

類似資料:

Hwang, B.K., Loboda, M.J., Cerny, G., Schneider, R., Seifferly, J.

Electrochemical Society

Neimontas, K., Kadys, A., Aleksiejunas, R., Jarasiunas, K., Chung, G., Sanchez, E.K., Loboda, M.J.

Trans Tech Publications

Loboda, M.J., Seifferly, J.A., Schneider, R.F., Grove, C.M.

Electrochemical Society

Maracas, G.N., Shiralagi, K.T., Puechner, R.A., Yu, F., Choi, K.T., Bow, J.S., Ramamurti, R., Kim, M.J., Carpenter, R.W.

Materials Research Society

W.K. Weidner, L.M. Zambov, V.A. Shamamian, S.V. Perz, R.C. Camilletti, S.A. Snow, M.J. Loboda, G.A. Cerny

Society of Vacuum Coaters

Hansen, D.M., Chung, G., Loboda, M.J.

Trans Tech Publications

Teowee, G., Boulton, J. M., Fox, H. H., Koussa, A., Gudgel, T., Uhlmann, D. R.

Materials Research Society

Baklanov, M.R., Mogilnikov, K.P.

Materials Research Society

M. Dudley, S. Byrappa, H. Wang, F. Wu, Y. Zhang, B. Raghothamachar, G. Choi, E.K. Sanchez, D. Hansen, R. Drachev, M.J. …

Materials Research Society

Ko, M.J., Moon, M.S., Shin, D.S., Kang, J.W., Nain, H.T.

Electrochemical Society

Brady, D., Watt, V.H.C., Karamcheti, A., Vishnubhotla, L., Bersuker, G., Kim, S., Zietzoff, P., Gilmer, M., Guan, J., …

Electrochemical Society

G.Y. Chung, M.J. Loboda, M.J. Maminella, D.K. Schroder, T. Isaacs-Smith

Trans Tech Publications

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12