Characterization of Ashing Effects on Low-k Dielectric Films
- 著者名:
- Shepherd, R.A. ( (GaSonics International Corporation) )
- Nguyen, D. ( (GaSonics International Corporation) )
- Cerny, G. ( (Dow Corning) )
- Loboda, M.J. ( (Dow Corning) )
- 掲載資料名:
- Low and high dielectric constant materials : materials science, processing, and reliability issues : proceedings of the fifth international symposium
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 2000-5
- 発行年:
- 2000
- 開始ページ:
- 159
- 終了ページ:
- 167
- 総ページ数:
- 9
- 出版情報:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772709 [1566772702]
- 言語:
- 英語
- 請求記号:
- E23400/2000-5
- 資料種別:
- 国際会議録
類似資料:
Electrochemical Society |
Trans Tech Publications |
Electrochemical Society |
Materials Research Society |
Society of Vacuum Coaters |
Trans Tech Publications |
Materials Research Society |
Materials Research Society |
Materials Research Society |
Electrochemical Society |
Electrochemical Society |
Trans Tech Publications |