Contact Angle Measurement of Wafer Surfaces for Integrating Laser Diode and Optical Isolator by Wafer Bonding

Contact Angle Measurement of Wafer Surfaces for Integrating Laser Diode and Optical Isolator by Wafer Bonding

著者名:

Yokoi, H.

掲載資料名:

Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

99-35

発行年:

1999

開始ページ:

311

終了ページ:

317

総ページ数:

7

出版情報:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566772587 [1566772583]

言語:

英語

請求記号:

E23400/99-35

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013963
シリーズID:	PA00000028
会議名:	International Symposium on Wafer Bonding ; Fall Meeting of the Electrochemical Society
回次:	5th ; 1999
会議開催地:	Honololu. HI, USA
会議開催年:	1999.10.00

類似資料:

1 国際会議録 Integrated Optical Isolator Employing Nonreciprocal Phase Shift by Wafer Direct Bonding Yokoi, H., Mizumoto, T. MRS - Materials Research Society	7 国際会議録 Optical Isolator with Si Guiding Layer Fabricated by UV-Activated Bonding H. Yokoi, K. Sasaki Electrochemical Society
2 国際会議録 TE-TM Mode Conversion Optical Isolator Fabricated by Wafer Bonding Yokoi, H., Mizumoto, T., Iwasaki, H. Electrochemical Society	8 国際会議録 Selective area growth of magnetic garnet crystals by liquid-phase epitaxy Yokoi, H., Mizumoto, T. MRS-Materials Research Society
3 国際会議録 Waveguide Optical Isolators Fabricated by Wafer Bonding Mizumoto, Tetsuya, Yokoi, Hideki Materials Research Society	9 国際会議録 Large-Area Wafer Processing for AlGaAs Laser Diodes Nagai, Y., Shiba, T., Kunitsugu, Y., Miyashita, M., Kawano, M., Karakida, S., Shima, A., Hisa, Y., Nakano, H., Sato, K., … Electrochemical Society
4 国際会議録 Integration of optical isolators and semiconductor lasers by wafer bonding (Invited Paper) [6352-90] Mizumoto, T., Sakurai, K., Shoji, Y., Saito, H. SPIE - The International Society of Optical Engineering	10 国際会議録 Blue Laser on Copper: The Integration of InGAN Laser Diodes on Dissimilar Substrates by Wafer Bonding and Laser Liftoff (Invited) Wong, W., Kneissi, M., Treat, D., Teepe, M., Miyashita, N., Johnson, N. Electrochemical Society
5 国際会議録 Wafer bonding between InP and Ce:YIG(CeY2Fe5O12) using O2 plasma surface activation for an integrated optical waveguide isolator [6123-44] Roh, J. W., Yang, J. S., Ok, S H, Woo. D H, Byun, Y T, Jhon, Y M, Mizumoto. T, Lee, Y W, Lee. S SPIE - The International Society of Optical Engineering	11 国際会議録 Interferometric Optical Isolator with Si Guiding Layer Operated in Unidirectional Magnetic Field Yokoi, H. Electrochemical Society
6 国際会議録 Wafer Bonding of Magneto-Optic Garnet and its Application to Waveguide Optical Devices T. Mizumoto, H. Saito, K. Sakurai, Y. Shoji Electrochemical Society	12 国際会議録 Wafer Bonding for Optical MEMS Bakke, T., Volker, B., Schenk, H., Radu, I., Reiche, M. Electrochemical Society

1

2

3

4

5

6

7

8

9

10

11

12