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Surface Passivation for Low-Temperature UHV Wafer Bonding of GaAs Substrates

著者名:
Hesse, P.J.
Haas, T.W.
Lampert, W.V.
Eyink, K.G.
Tomich, D.H.
Seaford, M.L.
さらに 1 件
掲載資料名:
Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
99-35
発行年:
1999
開始ページ:
244
終了ページ:
258
総ページ数:
15
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772587 [1566772583]
言語:
英語
請求記号:
E23400/99-35
資料種別:
国際会議録

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