Blank Cover Image

Electrochemical Studies on Etching of Micro-Electromechanical Systems (MEMS) Materials in Tetramethyl Ammonium Hydroxide (TMAH) Solutions: A Review

著者名:
掲載資料名:
Electrochemical technology applications in electronics : proceedings of the third international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
99-34
発行年:
1999
開始ページ:
188
終了ページ:
196
総ページ数:
9
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772570 [1566772575]
言語:
英語
請求記号:
E23400/99-34
資料種別:
国際会議録

類似資料:

1 国際会議録 Electrochemical Behavior of Copper in Tetramethyl Ammonium Hydroxide Based Solutions

Fang, Y., Huang, W. H., Raghavan, S., Zhang, L.

Materials Research Society
7 国際会議録 Electrochemical and Thermal Behavior of Substituted Spinels LiM x Mn2 -x O5 (M=Co, Ni, and Fe) Prepared by Sol-Gel for Li ion Batteries

Bang, H.J., Donepudi, V.S., Prakash, I.

Electrochemical Society
2 国際会議録 ELECTROCHEMICAL AND THERMAL BEHAVIOR OF METAL COATED NATURAL GRAPHITE (MAG-20).

Lu, W., Donepudi, V.S., Parkash, J.

Electrochemical Society
8 国際会議録 NIO Cathode dissolution in the MCFC and a Review of Related Short Circuit Models

Yazici, M.S., Selman, J.R.

American Institute of Chemical Engineers
3 国際会議録 Effect of Tetramethyl Ammonium Hydroxide on Dispersion of the Silicon Carbide Submicron Powders

N. Wang, L.R. Deng, X.G. Wang, S.H. Lu

Trans Tech Publications
9 国際会議録 Electrochemical Response of Stainless Steel 310, 316L and Nickel-Rich Alloy in Molten Carbonate

Yazici, M.S., Selman, J.R.

Electrochemical Society
4 国際会議録 Optimization of TMAH etching for MEMS

Brida,S., Ferrario,L., Guarnieri,V., Giacomozzi,F., Margesin,B., Paranjape,M., Verzellesi,G., Zen,M.

SPIE - The International Society for Optical Engineering
10 国際会議録 Mechanism of Molybdenum Carbide Electrodeposition from Molten Salt - A Review

Selman, J.R., Lin, Y., Topor, D.

Electrochemical Society
5 国際会議録 Development of TMAH anisotropic etching manufacturing process for MEMS

Tsaur,J., Yang,S., Du,C.-H., Lin,Z., Huang,C., Lee,C.

SPIE-The International Society for Optical Engineering
11 国際会議録 KINETIC AND MATERIAL STUDIES IN MOLTEN ALKALI CARBONATES UNDER PRESSURIZED CATHODE GAS ENVIRONMENT

Yamada, K., Nishina, T., Uchida, I., Selman, J.R.

Electrochemical Society
6 国際会議録 Effect of Thiourea on Electrodeposition of Copper from Acid Sulfate Solution

Donepudi, V.S., Venkarachalapathy, R., Ozemoyah, P.O., Prakasli, J., Johnson, C.S.

Electrochemical Society
12 国際会議録 Department of Defense need for a micro-electromechanical systems (MEMS) reliability assessment program

Zunino lll, J.L., Skelton, D., Army Research, U.S.

SPIE - The International Society of Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12