RELIABILITY CHARACTERIZATION OF RuO2 THIN FILM RESISTORS

RELIABILITY CHARACTERIZATION OF RuO2 THIN FILM RESISTORS

著者名:

掲載資料名:

Corrosion and reliability of electronic materials and devices : proceedings of the fourth international symposium

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

99-29

発行年:

1999

開始ページ:

217

終了ページ:

230

総ページ数:

14

出版情報:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566772525 [1566772524]

言語:

英語

請求記号:

E23400/99-29

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013957
シリーズID:	PA00000028
会議名:	International Symposium on Corrosion and Reliability of Electronic Materials and Devices
回次:	4th
会議開催地:	Honolulu, Hawaii, USA
会議開催年:	1999.10.17-1999.10.22

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