Dry Etch and Process Integration: Development of 0.18 μm Production DRAM Process
- 著者名:
- 掲載資料名:
- ULSI process integration : proceedings of the first international symposium
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 99-18
- 発行年:
- 1999
- 開始ページ:
- 345
- 終了ページ:
- 346
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772419 [1566772419]
- 言語:
- 英語
- 請求記号:
- E23400/99-18
- 資料種別:
- 国際会議録
類似資料:
Electrochemical Society |
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Electrochemical Society |
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MRS - Materials Research Society |
11
国際会議録
Advanced statistical process control: controlling sub-0.18-μm lithography and other processes
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SPIE-The International Society for Optical Engineering |
Materials Research Society |