Poly Gate Depletion Effect on Deep Submicrometer CMOS
- 著者名:
Ye, Q. Limb, Y. Berry, W. Li, Y. Do Thanh, L. Rengarajan, R. Tonti, W. - 掲載資料名:
- ULSI process integration : proceedings of the first international symposium
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 99-18
- 発行年:
- 1999
- 開始ページ:
- 301
- 終了ページ:
- 310
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772419 [1566772419]
- 言語:
- 英語
- 請求記号:
- E23400/99-18
- 資料種別:
- 国際会議録
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