COP Induced Isolation Failures in Cz Wafers

COP Induced Isolation Failures in Cz Wafers

著者名:

掲載資料名:

ULSI process integration : proceedings of the first international symposium

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

99-18

発行年:

1999

開始ページ:

255

終了ページ:

266

出版情報:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566772419 [1566772419]

言語:

英語

請求記号:

E23400/99-18

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013947
シリーズID:	PA00000028
会議名:	International Symposium on ULSI Process Integration ; Meeting of the Electrochemical Society
回次:	1st ; 196th
会議開催地:	Honolulu, Hawaii, USA
会議開催年:	1999.10.17-1999.10.22

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2 国際会議録 Effect of Crystal Defects Such as COPs, Large Dislocations, and OSF Ring on Device Integrity Degradation Park, J.G., Lee, G.S., Park, J.M., Chon, S.M., Chung, H.K. Electrochemical Society	8 国際会議録 Improved characteristics of rainbow defects with novel wafer edge exposure technique Shim, K.-C., Kim, M.-S., Lee, E.-S., Lee, C.-S., Gil, M.-G., Kim, B.-H., In, J.-S., Yoon, T.-B., Kim, J.-S. SPIE-The International Society for Optical Engineering
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