Blank Cover Image

Scanning Rapid Thermal Annealing Process for Low Temperature Poly-Silicon Thin Film Transistors

著者名:
Kim, F.-K.
Kim, G.-B.
Yoon, Y-G.
Kim, C.-H.
Lee, B.-I.
Joo, S.-K.
さらに 1 件
掲載資料名:
Advances in rapid thermal processing : proceedings of the symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
99-10
発行年:
1999
開始ページ:
285
終了ページ:
290
総ページ数:
6
出版情報:
Pennington, N. J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772327 [156677232X]
言語:
英語
請求記号:
E23400/99-10
資料種別:
国際会議録

類似資料:

1 国際会議録 Development of an RTA Process for the Enhanced Crystallization of Amorphous Silicon Thin Films

Yoon, Y.-G., Kim, T.-K., Kim, K.-B., .Choi, J.-Y, Lee, B.-I, Joo, S.-K.

Electrochemical Society
7 国際会議録 Low-frequency noise parameter extraction in poly-Si thin-film transistors

Nam, H., Yang, H. -S., Lee, J., Chovet, A., Szentpali, B., Kim, E.

SPIE - The International Society of Optical Engineering
2 国際会議録 IN-SITU CRYSTALLIZATION OF AMORPHOUS SILICON FILMS BY LOW TEMPERATURE MULTI-STEP RAPID THERMAL ANNEALING PROCESS

Lee, Chang Woo, Kim, Seo Yoon, Lee, Choochon

Materials Research Society
8 国際会議録 A NEW DEVICE MODEL OF AMORPHOUS SILICON THIN-FILM TRANSISTOR FOR CIRCUIT SIMULATION

Choi, H.S., Park, J.S., Oh, C.H., Joo. I.S., Kim, Y.S., Han, M.K., Chio, Y.I., Yun, J.G., Park, W.K., Kim, W.Y.

Materials Research Society
3 国際会議録 The Characteristics of Hot-Carrier Stressed Bottom-Gate Polycrystalline Silicon Thin-Film Transistors Employing Alternating Magnetic-Field-Enhanced Rapid …

W. Lee, H. Shin, K. Cho, J. Choi, C. Kim

Electrochemical Society
9 国際会議録 High-Performance Low Temperature Poly-Silicon Thin Film Transistors Fabricated by Excimer Laser Irradiation with Bottom-Gate Scheme

C. Tsai, H. Chen, Y. Lee, H. Cheng

Electrochemical Society
4 国際会議録 Electrical Hysteresis Behavior of Low Temperature Polycrystalline Silicon Thin Film Transistors

D. Nam, H. Lee, S. Jung, T. Ahn, C. Kim

Electrochemical Society
10 国際会議録 Attainment of Low Resistivity Polycide Films Using Rapid Thermal Annealing

Yoon, H.A., Chen, C., Singhal, A., Lapes, D., Miner, G., Hong, S., Yamazaki, M., Maeda, Y.

Electrochemical Society
5 国際会議録 Low Temperature Processes of Organic Thin Film Transistor with Gate Dielectric of Silicon Dioxide Deposited by Scanning Atmospheric-Pressure Technology

K. Chang, S. Huang, C. Lin, Y. Wu

Electrochemical Society
11 国際会議録 Low Temperature As-Deposited Polycrystalline Silicon for Thin Film Transistor

Ryu, J.I., Kim, H.C., Kim, J.G., Jang, J.

Electrochemical Society
6 国際会議録 The Electrical Properties of Low Temperature Polycrystalline Si Thin Film Transistor Prepared by Nickel-ALD Process

S. Lee, C. Lee, T. Jeong, H. Kim

Electrochemical Society
12 国際会議録 HYDROGENATION EFFECT OF AMORPHOUS SILICON THIN FILM TRANSISTORS BY ATMOSPHERIC PRESSURE CVD

Ahn, B.C., Kim, J.H., Kim, D.G., Moon, B.Y., Kim, K.N., Lee, C.W., Jang, J.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12