Recent Developments in Ultratlsin Nitride Gate Stack Prepared by In-Situ RTP Multiprocessing for CMOS ULSI
- 著者名:
Song, S.C. Kini, B.Y. Loan, H.F. Kwong, D.-L. Gardner, M. Fulford, J. Wristers, D. Gelpey, J. Marcus, S. - 掲載資料名:
- Advances in rapid thermal processing : proceedings of the symposium
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 99-10
- 発行年:
- 1999
- 開始ページ:
- 45
- 終了ページ:
- 56
- 総ページ数:
- 12
- 出版情報:
- Pennington, N. J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772327 [156677232X]
- 言語:
- 英語
- 請求記号:
- E23400/99-10
- 資料種別:
- 国際会議録
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