Continuous Optical Monitoring of Gaseous Halogens from Tool Effluents

Continuous Optical Monitoring of Gaseous Halogens from Tool Effluents

著者名:

Laush, C. ( Radian International )
Mendicino, L. ( Motorola )
Brown, P.T. ( Motorola )

掲載資料名:

Environmental issues in the electronics and semiconductor industries : proceedings of the second international symposium

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

99-8

発行年:

1999

開始ページ:

126

終了ページ:

134

出版情報:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566772303 [1566772303]

言語:

英語

請求記号:

E23400/99-8

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013938
シリーズID:	PA00000028
会議名:	Symposium on Environmental Issues with Materials and Processes in the Electronics and Semiconductor Industries ; Meeting of the Electrochemical Society
回次:	2nd ; 195th
会議開催地:	Seattle, WA, USA
会議開催年:	1999.05.00

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