Exhaust Gas Abatement Using ASTRON - a Compact, Low-Field Toroidal Plasma Source | 東京工業大学附属図書館文献データベース

Exhaust Gas Abatement Using ASTRON - a Compact, Low-Field Toroidal Plasma Source

著者名:

Cheng, X. ( AsteX, Inc. )
Holber, W. ( AsteX, Inc. )
Basnett, R. ( AsteX, Inc. )
Smith, D. ( AsteX, Inc. )

掲載資料名:

Environmental issues in the electronics and semiconductor industries : proceedings of the second international symposium

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

99-8

発行年:

1999

開始ページ:

70

終了ページ:

78

出版情報:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566772303 [1566772303]

言語:

英語

請求記号:

E23400/99-8

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013938
シリーズID:	PA00000028
会議名:	Symposium on Environmental Issues with Materials and Processes in the Electronics and Semiconductor Industries ; Meeting of the Electrochemical Society
回次:	2nd ; 195th
会議開催地:	Seattle, WA, USA
会議開催年:	1999.05.00

類似資料:

1 国際会議録 An Efficient, Highly Reliable Plasma Tool for PFC Abatement Chen, X., Holber, W., Peter, M. Electrochemical Society	7 国際会議録 Compact laser plasma EUV source based on a gas puff target for metrology Fiedorowicz, H., Bartnik, A., Jarocki, R., Kostecki, J., Mikolajczyk, J., Rakowski, R., Szczurek, M. SPIE-The International Society for Optical Engineering
2 国際会議録 Remote Plasma Clean Technology for Dielectric CVD Chamber Cleaning to Reduce PFC Emissions Mendicino, L., Brown, P.T., Filipak, S., Loop, D., Basnett, R., Holber, W., Pearce, R., Johnson, A. Electrochemical Society	8 国際会議録 A Study of Low-Temperature Grown GaP by Gas-Source Molecular Beam Epitaxy Bi, W. G., Mei, X. B., Kavanagh, K. L., Tu, C. W., Stach, E. A., Hull, R. MRS - Materials Research Society
3 国際会議録 Abatement of Greenhouse Gases Using Surface Wave Plasmas Wofford, B., Vartanian, V., Beu, L., Lii, T., Worth, W.F., Hartz, C.L., Bevan, J.W. Electrochemical Society	9 国際会議録 Low-Temperature Deposition of ZrC Thin Films from a Single-Source Precursor Smith, D.C., Healy, M.D., Rubiano, R.R., Springer, R.W. Electrochemical Society
4 国際会議録 Laboratory Studies of the Flow Field Characteristics of Low-Swirl Injectors for Adaptation to Fuel-Flexible Turbines R. K. Cheng, D. Littlejohn, W. A. Nazeer, K. O. Smith American Society of Mechanical Engineers	10 国際会議録 Neutron sources for BNCT using low-power research reactors or compact charged particle accelerators Harker,Y.D., Nigg,D.W., Mitchell,H.E., Wheeler,F.J., Jones,J.L. SPIE-The International Society for Optical Engineering
5 国際会議録 Lithography using a compact plasma focus electron source Lee,P., Feng,X., Zhang,G.X., Liu,M.H., Lee,S. SPIE-The International Society for Optical Engineering	11 国際会議録 TECHNOLOGY RELATED TO SOURCES OF HEAVY METALS AND THE ABATEMENT THEREOF Pacyna M. J., Ensor S. D., Elias R. Kluwer
6 テクニカルペーパー Compact Toroid Formation using an Annular Helicon Preionization Source R. Stubbers, B. Jurczyk, J. Rovey, M. Coventry, D. Alman, M. Walker American Institute of Aeronautics and Astronautics	12 国際会議録 LOW-TEMPERATURE DEPOSITION OF ZrC THIN FILMS FROM A SINGLE-SOURCE PRECURSOR Smith, David C., Rubiano, Rodrigo R., Healy, Matthew D., Springer, Robert W. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12