Characterization, Electrical Properties, and Interface Engineering of Sputtered Ba0.5Sr0.5 TiO3 Thin Films for DRAM Applications

Characterization, Electrical Properties, and Interface Engineering of Sputtered Ba0.5Sr0.5 TiO3 Thin Films for DRAM Applications

著者名:

Chu, P.

掲載資料名:

Low and High Dielectric Constant Materials : Materials Science, Processing, and Reliability Issues, proceedings of the fourth International Symposium and Thin Film Materials for Advanced Packaging Technologies : proceedings of the second International Symposium

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

99-7

発行年:

1999

開始ページ:

83

終了ページ:

90

総ページ数:

8

出版情報:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566772297 [156677229X]

言語:

英語

請求記号:

E23400/99-7

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013937
シリーズID:	PA00000028
会議名:	International Symposium on Low and High Dielectric Constant Materials ; International Symposium on Thin Film Materials for Advanced Packaging
回次:	4th ; 2nd
会議開催地:	Seattle, WA, USA
会議開催年:	1999.05.02-1999.05.07

類似資料:

1 国際会議録 Barium Strontium Titanate Capacitors for Future High Density DRAMs Jones, R.E., Jr., Zafar, S., white, B.E., Jiang, B., Melnick, B.M., Zurcher, P., Chu, P.Y., Taylor, D.J., Remmel, T.P., … Electrochemical Society	7 国際会議録 Dielectric Properties of Sputtered BST on Ir Electrodes White, B. E., Jr., Chu, Peir Y., Zafar, Sufi, Balu, V., Gentile, D., Jones, Robert E., Jiang, Bo, Melnick, Bradley, … MRS - Materials Research Society
2 国際会議録 Structural and ferroelectric properties of epitaxial La0.5Sr0.5CoO3/Ba0.4Sr0.6TiO3/La0.5Sr0.5CoO3 thin-film capacitors on silicon for DRAM applications Kung, Pang-Jen, Fenner, David B., Li, Qi Materials Research Society	8 国際会議録 Material and Electrical Characterization of Carbon-Doped Ta2O5 Films for Embedded DRAM Applications Chu, Karen, Cho, Byeong-Ok, Chang, Jane P., Steigerwald, Mike L., Fleming, Robert M., Opila, Robert L., Lang, Dave V., … Materials Research Society
3 国際会議録 Structural and Electrical Properties of Ba0.5Sr0.5TiO3 Thin Films for Tunable Microwave Applications Manavalan, Sriraj G., Kumar, Ashok, Weller, T., Sikder, A.K. Materials Research Society	9 国際会議録 Improved Dielectric Properties of Heterostructured Ba0.5Sr0.5TiO3 Thin Film Composites for Microwave Dielectric Devices Jain, M., Majumder, S. B., Katiyar, R. S., Bhalla, A. S., Agrawal, D. C., Van Keuls, F. W., Miranda, F. A., Romanofsky, … Materials Research Society
4 国際会議録 Barium Strontium Titanate Capacitors for Embedded DRAM Zurcher, P., Tracy, C. J., Jones, R. E., Jr., Alluri, P., Chu, P. Y., Jiang, B., Kim, M., Melnick, B. M., Raymond, M. … MRS - Materials Research Society	10 国際会議録 Electrical Properties of Annealed La0.5Sr0.5MnO3-d Thin Films Prepared by Pulsed Laser Deposition Quenneville, F., Decorse, P., Meunier, M., Morin, F., Yelon, A. Electrochemical Society
5 国際会議録 GROWTH AND CHARACTERIZATION OF Ba0.5Sr0.5TiO3 THIN FILMS ON Si (100) BY 90｡? OFF-AXIS SPUTTERING Hou, S. Y., Kwo, J., Watts, R. K., Werder, D. J., Shmulovich, J., O'Bryan, H. M. MRS - Materials Research Society	11 国際会議録 Na0.5Bi0.5TiO3-based ferroelectric thin films [6029-30] Wang Zh., Yang Ch. H., Xu H. Z., Qin L. J., Yang Y. G. SPIE - The International Society of Optical Engineering
6 国際会議録 Influence of Ta2O5, TiO2, and ZrO2 Interfacial Layers on Structural and Electrical Properties of Laser Ablated Ba0.5Sr0.5TiO3 Thin Films Das, Suprem R., Das, Rasmi R., Bhattacharya, P., Katiyar, Ram S. Materials Research Society	12 国際会議録 Leakage Current and Dielectric Properties of Ba0.5Sr0.5TiO3 Films Deposited by RF Sputtering at Low Substrate Temperature Cramer, Nicholas, Kalkur, Thottam S., Philofsky, Elliot, Kammerdiner, Lee Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12