Study on Chemical-Mechanical Polishing of Low Dielectric Constant Polyimide Thin Films
- 著者名:
- 掲載資料名:
- Low and High Dielectric Constant Materials : Materials Science, Processing, and Reliability Issues, proceedings of the fourth International Symposium and Thin Film Materials for Advanced Packaging Technologies : proceedings of the second International Symposium
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 99-7
- 発行年:
- 1999
- 開始ページ:
- 15
- 終了ページ:
- 23
- 総ページ数:
- 9
- 出版情報:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772297 [156677229X]
- 言語:
- 英語
- 請求記号:
- E23400/99-7
- 資料種別:
- 国際会議録
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