Silicon-Oxynitride Layers For Optical Waveguide Applications

Silicon-Oxynitride Layers For Optical Waveguide Applications

著者名:

Germann, R.

掲載資料名:

Silicon nitride and silicon dioxide thin insulating films, proceedings of the fifth International Symposium

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

99-6

発行年:

1999

開始ページ:

169

終了ページ:

182

総ページ数:

14

出版情報:

Pennington, New Jersey: Electrochemical Society

ISSN:

01616374

ISBN:

9781566772280 [1566772281]

言語:

英語

請求記号:

E23400/99-6

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013936
シリーズID:	PA00000028
会議名:	Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
回次:	5th
会議開催地:	Seattle, WA, USA
会議開催年:	1999.05.02-1999.05.07

類似資料:

1 国際会議録 Silicon-oxynitride (SiON) for photonic integrated circuits Salemink, H. W. M., Horst, F., Germann, R., Offrein, B. J., Bona, G. L. MRS-Materials Research Society	7 国際会議録 Integration of optical I/O with organic chip packages B. J. Offrein, C. Berger, L. Dellmann, P. Dill, F. Horst, M. Schmatz Society of Photo-optical Instrumentation Engineers
2 国際会議録 Compact and robust 10- to 40-GHz optical time-domain multiplexer based on high-index-contrast silicon-oxynitride waveguide technology Dangel, R.F., Offrein, B.J., Horst, F., Germann, R., Bona, G.-L., Weingarten, K.J., Spuehler, G.J. SPIE-The International Society for Optical Engineering	8 国際会議録 Echelle grating WDM (de-)multiplexers in SOI technology, based on a design with two stigmatic points F. Horst, W. M. J. Green, B. J. Offrein, Y. Vlasov Society of Photo-optical Instrumentation Engineers
3 国際会議録 Characterization of parallel optical-interconnect waveguides integrated on a printed circuit board Bona, G.L., Offrein, B.J., Bapst, U., Berger, C., Beyeler, R., Budd, R., Dangel, R., Dellmann, L., Horst, F. SPIE - The International Society of Optical Engineering	9 国際会議録 Deep dry etching process development for photonic crystals in InP-based planar waveguides van der Heijden, R.W., Andriesse, M.S.P., Carlstrom, C.-F., van der Drift, E., Geluk, E.-J., Karouta, A.F., Nouwens, … SPIE - The International Society of Optical Engineering
4 国際会議録 Birefringence control and manipulation in silicon-oxynitride Horst, F., Offrein, B., Dangel, R., Wiesmann, D., Koster, T., Bona, G.-L. SPIE - The International Society of Optical Engineering	10 国際会議録 Integration of optical I/O with organic chip packages C. Berger, L. Dellmann, P. Dill, F. Horst, B. J. Offrein Society of Photo-optical Instrumentation Engineers
5 国際会議録 Isotope Exchange In Hydrogenated Silicon-Oxynitride (SiON) For 1.55 μm Optical Waveguide Applications Cheng, K., Lee, J., Lyding, J. W., Salemink, H. W. M. Materials Research Society	11 国際会議録 Simulation and fabrication of silicon oxynitride array waveguide grating for optical communication Liu, W.-J., Lai, Y.-C., Weng, M.-H., Chen, C.-M., Lee, P.-H. SPIE - The International Society of Optical Engineering
6 国際会議録 Properties of Annealed Silicon Oxynitride Layers for Optical Applications Woerhoff, K., Hussein, G.M., Roeloffzen, C.G.H., Hildennk, L.T.H. Electrochemical Society	12 国際会議録 Parallel optical interconnects in printed circuit boards [5990A-14] Offein, B. J., Berger, C., Beyeler, R., Dangel, R., Dellmann, L., Horst, F., Lamprecht, T., Meier, N., Budd, R., Libsch, … SPIE - The International Society of Optical Engineering

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