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Silicon Carbon Nitride Films Deposited by ECR CVD

著者名:
Chen, K-H.
Wu, J.-J.
Wen, C.-Y.
Chen, L-C.
Fan, C.-W
Kuo, P.-F.
Chen, Y.-F.
Huang, Y.-S.
さらに 3 件
掲載資料名:
Proceedings of the State-of-the-Art Program on Compound Semiconductors (SOTAPOCs XXX)
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
99-4
発行年:
1999
開始ページ:
13
終了ページ:
24
総ページ数:
12
出版情報:
Pennington, N. J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772266 [1566772265]
言語:
英語
請求記号:
E23400/99-4
資料種別:
国際会議録

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