Effect of Buried Oxide on Reliability of Thin-Film SOI nMOSFETs

Effect of Buried Oxide on Reliability of Thin-Film SOI nMOSFETs

著者名:

Kim, H-K ( (Hyundai Electronics) )
Lee, J-W ( (Hyundai Electronics) )
Lee, W-H ( (Hyundai Electronics) )
Oh, M-R ( (Hyundai Electronics) )
Koh, Y-H ( (Hyundai Electronics) )

掲載資料名:

Proceedings of the Ninth International Symposium on Silicon-on-Insulator Technology and Devices

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

99-3

発行年:

1999

開始ページ:

255

終了ページ:

259

総ページ数:

5

出版情報:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566772259 [1566772257]

言語:

英語

請求記号:

E23400/99-3

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013933
シリーズID:	PA00000028
会議名:	International Symposium on Silicon-on-Insulator Technology and Devices ; Meeting of the Electrochemical Society
回次:	9th ; 195th
会議開催地:	Seattle, WA, USA
会議開催年:	1999.05.02-1999.05.07

類似資料:

1 国際会議録 Direct Determination of Effect of SOI Defects on GOI Characteristics Lee, W-H, Lee, J-W, Kim, H-K, Oh, M-R, Koh, Y-H Electrochemical Society	7 国際会議録 SOI Wafers with Buried Cavities Suni, T., Henttinen, K., Dekker, J., Luoto, H., Kulawski, M., Makinen, J., Mutikainen, R. Electrochemical Society
2 国際会議録 Hot-Carrier Degradation Behavior in Thin-Film SOT nMOSFETs With LOCOS and STI Lee, J-W, Kim, H-K, Lee, W-H, Oh, M-R, Kob, Y-H Electrochemical Society	8 国際会議録 Magnetoimpedance Effect in Mumetal Thin Films Cho, W.-S., Lee, H., Yoon, T.-S., Lee, K.-J., Kim, C.-O. Trans Tech Publications
3 国際会議録 Evaluation of SOI wafers using C-V characteristics of thin-film MOS capacitor Lee, J.W., Yang, J.W., Lee, W.C., Oh, M.R., Koh, Y.H. Electrochemical Society	9 国際会議録 Defects and electrical consequences in SOI buried oxides Hovel, H.J., Ahnonte, M., Lee, J.D, Sadana, D., Domenicucci, A., Bettinger, J. Electrochemical Society
4 国際会議録 The Evaluation of the Elastic Property in Nano-Scaled Thin Compressive Film on Patterned Substrates Moon, M. W., Kim, Y. Y., Lee, K. R., Oh, K. H. Trans Tech Publications	10 国際会議録 ACCELERATED DEGRADATION MECHANISMS IN AMORPHOUS SILICON THIN FILM TRANSISTORS . Chung, I.J., Oh, C.H., Kim, W.Y., Hwang, J.Y., Kim, Y.S., Park, J.S., Lee, S.K., Han, M.K. Materials Research Society
5 国際会議録 Reliability of Electrodeposited Copper and ECRCVD SiOF Films for Multilevel Metallization Kim, Y-A., Kim, Y-I., Lee, K-W., Lee, S., Oh, K., Park, J-W., Sohn, S., Yang, S-H. Materials Research Society	11 国際会議録 AFM Studies on the Effect of Crystalline Interphase on Adhesion of Polyurethane Thin Film to Al Substrate J.S. Kim, O.H. Lee, Y.S. Lim Trans Tech Publications
6 国際会議録 The Thermal Annealing Effect on the Residual Stress and Mechanical Property in the Compressive Stressed DLC Film Choi, H. W., Moon, M. W., Kim, T. Y., Lee, K. R., Oh, K. H. Trans Tech Publications	12 国際会議録 The Evaluation of Adhesion Energy in Thin Compressively Stressed Film by Using Delamination Buckle and Freehanging Buckle Oh, K. H., Moon, M. W., Lee, K. R. Trans Tech Publications

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