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Direct Determination of Effect of SOI Defects on GOI Characteristics

著者名:
  • Lee, W-H ( (Hyunda' Electronics Industries Co) )
  • Lee, J-W ( (Hyunda' Electronics Industries Co) )
  • Kim, H-K ( (Hyunda' Electronics Industries Co) )
  • Oh, M-R ( (Hyunda' Electronics Industries Co) )
  • Koh, Y-H ( (Hyunda' Electronics Industries Co) )
掲載資料名:
Proceedings of the Ninth International Symposium on Silicon-on-Insulator Technology and Devices
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
99-3
発行年:
1999
開始ページ:
179
終了ページ:
183
総ページ数:
5
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772259 [1566772257]
言語:
英語
請求記号:
E23400/99-3
資料種別:
国際会議録

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